Awarded
Provision of One Cluster Tool with One (1) Unit of Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber and One (1) Unit of Atomic Layer Etching (ALE) Chamber
Shown in the language the agency published it in. No English translation is available.
- Agency
- Agency for Science, Technology and Research
- Market
- Singapore
- Reference
- NST000ETT23000077
- Published
- 19 Feb 2024
Award
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
SGD 2,926,503.72
Source
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